Optimization and fabrication of low stress-low temperature silicon oxide cantilevers - researchr publication authors

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A. Kshirsagar, S. P. Duttagupta, S. A. Gangal. Optimization and fabrication of low stress-low temperature silicon oxide cantilevers. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 466-470, IEEE, 2011. [doi]

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