A. Kshirsagar, S. P. Duttagupta, S. A. Gangal. Optimization and fabrication of low stress-low temperature silicon oxide cantilevers. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 466-470, IEEE, 2011. [doi]
@inproceedings{KshirsagarDG11,
title = {Optimization and fabrication of low stress-low temperature silicon oxide cantilevers},
author = {A. Kshirsagar and S. P. Duttagupta and S. A. Gangal},
year = {2011},
doi = {10.1109/NEMS.2011.6017394},
url = {http://dx.doi.org/10.1109/NEMS.2011.6017394},
researchr = {https://researchr.org/publication/KshirsagarDG11},
cites = {0},
citedby = {0},
pages = {466-470},
booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
publisher = {IEEE},
}