Identification of Process Models and Controller Design for Vacuum Coating Processes with a Long Dead time using an Identification Tool with Advisory Support

Helmuth Kubin, Thomas Unkelbach, Manfred Benesch, Frank-Holm Rögner, Alexander Dementjev, Klaus Kabitzsch, Christoph Metzner. Identification of Process Models and Controller Design for Vacuum Coating Processes with a Long Dead time using an Identification Tool with Advisory Support. In Proceedings of 12th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2009, September 22-25, 2008, Palma de Mallorca, Spain. pages 1-8, IEEE, 2009. [doi]

Abstract

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