Anjali V. Kulkarni, Madhuri G. Karnik. Experimental Measurements and Theoretical Estimation of Temperature in ECDM Process. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 243-247, IEEE Computer Society, 2004. [doi]
Abstract is missing.