Noise performance improvement through optimized stacked layer of liner structure around the TSV in 3D IC

C. Hemanth Kumar, Asisa Kumar Panigrahi, Om Krishan Singh, Shiv Govind Singh. Noise performance improvement through optimized stacked layer of liner structure around the TSV in 3D IC. In 2016 IEEE International 3D Systems Integration Conference, 3DIC 2016, San Francisco, CA, USA, November 8-11, 2016. pages 1-4, IEEE, 2016. [doi]

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