Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system

Hardeep Kumar, K. K. Singh, Neeru Sood, Anuj Kumar, R. K. Mittal. Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system. In IEEE Sensors Applications Symposium, SAS 2014, Queenstown, New Zealand, February 18-20, 2014. pages 181-184, IEEE, 2014. [doi]

@inproceedings{KumarSSKM14,
  title = {Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system},
  author = {Hardeep Kumar and K. K. Singh and Neeru Sood and Anuj Kumar and R. K. Mittal},
  year = {2014},
  doi = {10.1109/SAS.2014.6798942},
  url = {https://doi.org/10.1109/SAS.2014.6798942},
  researchr = {https://researchr.org/publication/KumarSSKM14},
  cites = {0},
  citedby = {0},
  pages = {181-184},
  booktitle = {IEEE Sensors Applications Symposium, SAS 2014, Queenstown, New Zealand, February 18-20, 2014},
  publisher = {IEEE},
}