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Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system

Hardeep Kumar, K. K. Singh, Neeru Sood, Anuj Kumar, R. K. Mittal. Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system. In IEEE Sensors Applications Symposium, SAS 2014, Queenstown, New Zealand, February 18-20, 2014. pages 181-184, IEEE, 2014. [doi]

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