Dynamic deformation of stretched membrane in drum-type micromirror

Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki. Dynamic deformation of stretched membrane in drum-type micromirror. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 255-260, IEEE, 2011. [doi]

@inproceedings{KunduHKS11,
  title = {Dynamic deformation of stretched membrane in drum-type micromirror},
  author = {Subrata Kumar Kundu and Akiyoshi Hikita and Shinya Kumagai and Minoru Sasaki},
  year = {2011},
  doi = {10.1109/MHS.2011.6102188},
  url = {http://dx.doi.org/10.1109/MHS.2011.6102188},
  researchr = {https://researchr.org/publication/KunduHKS11},
  cites = {0},
  citedby = {0},
  pages = {255-260},
  booktitle = {International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011},
  publisher = {IEEE},
  isbn = {978-1-4577-1360-6},
}