Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki. Dynamic deformation of stretched membrane in drum-type micromirror. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 255-260, IEEE, 2011. [doi]
Abstract is missing.