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Correction of Perspective Distortion for Wafer Inspection

Sridhar R. Kundur, A. S. Rabinowitz. Correction of Perspective Distortion for Wafer Inspection. In Reinhard Klette, Georgy L. Gimel farb, Ramakrishna Kakarala, editors, Image and Vision Computing New Zealand, International Conference, IVCNZ 98, Auckland, New Zealand, November 1998, Proceedings. pages 297-302, The University of Auckland, 1998.

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