Yang-Kuao Kuo, Chuen-Guang Chao. Control ability of spin coating planarization of resist filmand optimal control of developers. Microelectronics Journal, 37(8):759-764, 2006. [doi]
@article{KuoC06,
title = {Control ability of spin coating planarization of resist filmand optimal control of developers},
author = {Yang-Kuao Kuo and Chuen-Guang Chao},
year = {2006},
doi = {10.1016/j.mejo.2005.10.009},
url = {http://dx.doi.org/10.1016/j.mejo.2005.10.009},
researchr = {https://researchr.org/publication/KuoC06},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {37},
number = {8},
pages = {759-764},
}