Distributed performance evaluation of a controlled IC fab

Chung-Hsien Kuo, Han-Pang Huang. Distributed performance evaluation of a controlled IC fab. IEEE Transactions on Robotics, 19(6):1027-1033, 2003. [doi]

@article{KuoH03-0,
  title = {Distributed performance evaluation of a controlled IC fab},
  author = {Chung-Hsien Kuo and Han-Pang Huang},
  year = {2003},
  doi = {10.1109/TRA.2003.819720},
  url = {http://dx.doi.org/10.1109/TRA.2003.819720},
  researchr = {https://researchr.org/publication/KuoH03-0},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Robotics},
  volume = {19},
  number = {6},
  pages = {1027-1033},
}