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The preparation of organic light-emitting diode encapsulation barrier layer by low-temperature plasma-enhanced chemical vapor deposition: a study on the \(\hbox {SiO}_\mathrm{x}\hbox {N}_\mathrm{y}\) film parameter optimization

Chung-Feng Jeffrey Kuo, Wei-Lun Lan, Yu-Cheng Chang, Kun-Wei Lin. The preparation of organic light-emitting diode encapsulation barrier layer by low-temperature plasma-enhanced chemical vapor deposition: a study on the \(\hbox {SiO}_\mathrm{x}\hbox {N}_\mathrm{y}\) film parameter optimization. J. Intelligent Manufacturing, 27(3):581-593, 2016. [doi]

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