Shou-Yi Kuo, Kou-Chen Liu, Fang-I Lai, Jui-Fu Yang, Wei-Chun Chen, Ming-Yang Hsieh, Hsin-I Lin, Woei-Tyng Lin. Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films. Microelectronics Reliability, 50(5):730-733, 2010. [doi]
Abstract is missing.