Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan. Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application. In 2004 IEEE International Conference on Robotics and Biomimetics, ROBIO 2004, Shenyang, China, August 22-26, 2004. pages 290-295, IEEE, 2004. [doi]
@inproceedings{KuoLP04,
title = {Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application},
author = {Ju-Nan Kuo and Gwo-Bin Lee and Wen-Fung Pan},
year = {2004},
doi = {10.1109/ROBIO.2004.1521792},
url = {http://dx.doi.org/10.1109/ROBIO.2004.1521792},
researchr = {https://researchr.org/publication/KuoLP04},
cites = {0},
citedby = {0},
pages = {290-295},
booktitle = {2004 IEEE International Conference on Robotics and Biomimetics, ROBIO 2004, Shenyang, China, August 22-26, 2004},
publisher = {IEEE},
isbn = {0-7803-8614-8},
}