Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application

Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan. Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application. In 2004 IEEE International Conference on Robotics and Biomimetics, ROBIO 2004, Shenyang, China, August 22-26, 2004. pages 290-295, IEEE, 2004. [doi]

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