Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei Huang. Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 33(5):641-648, 2003.
@article{KuoWH03,
title = {Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net},
author = {Chung-Hsien Kuo and Chao-Hsiung Wang and Kuo-Wei Huang},
year = {2003},
tags = {modeling},
researchr = {https://researchr.org/publication/KuoWH03},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
volume = {33},
number = {5},
pages = {641-648},
}