Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication

Yiyo Kuo, Taho Yang, Brett A. Peters, Ihui Chang. Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication. Simulation Modelling Practice and Theory, 15(8):1002-1015, 2007. [doi]

Abstract

Abstract is missing.