Development of New Complex Machining Technology for Single Crystal Silicon Carbide Polishing

Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato. Development of New Complex Machining Technology for Single Crystal Silicon Carbide Polishing. IJAT, 10(5):786-793, 2016. [doi]

Abstract

Abstract is missing.