Yoshihiko Kurui, Hideyuki Tomizawa, Akira Fujimoto, Tomohiro Saito, Akihiro Kojima, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata. The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]
@inproceedings{KuruiTFSKISS17,
title = {The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors},
author = {Yoshihiko Kurui and Hideyuki Tomizawa and Akira Fujimoto and Tomohiro Saito and Akihiro Kojima and Tamio Ikehashi and Yoshiaki Sugizaki and Hideki Shibata},
year = {2017},
doi = {10.1109/ICSENS.2017.8233927},
url = {https://doi.org/10.1109/ICSENS.2017.8233927},
researchr = {https://researchr.org/publication/KuruiTFSKISS17},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017},
publisher = {IEEE},
isbn = {978-1-5090-1012-7},
}