Daniel Kurz, Jürgen Pilz, Andrea Schirru, Simone Pampuri, Cristina De Luca. A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. In Stephen J. Buckley, John A. Miller, editors, Proceedings of the 2014 Winter Simulation Conference, Savannah, GA, USA, December 7-10, 2014. pages 2649-2660, IEEE/ACM, 2014. [doi]
Abstract is missing.