A monolithic 3D design technology co-optimization with back-end-of-line oxide channel transistor

Jungyoun Kwak, Gihun Choe, Shimeng Yu. A monolithic 3D design technology co-optimization with back-end-of-line oxide channel transistor. In Christof Teuscher, Jie Han 0001, editors, Proceedings of the 17th ACM International Symposium on Nanoscale Architectures, NANOARCH 2022, Virtual, OR, USA, December 7-9, 2022. ACM, 2022. [doi]

Authors

Jungyoun Kwak

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Gihun Choe

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Shimeng Yu

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