Jungyoun Kwak, Gihun Choe, Shimeng Yu. A monolithic 3D design technology co-optimization with back-end-of-line oxide channel transistor. In Christof Teuscher, Jie Han 0001, editors, Proceedings of the 17th ACM International Symposium on Nanoscale Architectures, NANOARCH 2022, Virtual, OR, USA, December 7-9, 2022. ACM, 2022. [doi]
Abstract is missing.