Effect of planarity on the 3D integration in 3-D integrated CMOS image sensor

Nam Hee Kwon, S. M. Hong, Yong-Won Cha, Sun Jae Lee, Han Gyul Lee, Areum Kim, Soo-Won Kim, Chang-Hyun Kim, Sung Gyu Pyo. Effect of planarity on the 3D integration in 3-D integrated CMOS image sensor. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-3, IEEE, 2011. [doi]

Abstract

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