SysML-based Simulation Framework for Semiconductor Manufacturing - researchr publication authors

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Ky Sang Kwon, Leon F. McGinnis. SysML-based Simulation Framework for Semiconductor Manufacturing. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 1075-1080, IEEE, 2007. [doi]

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