Ky Sang Kwon, Leon F. McGinnis. SysML-based Simulation Framework for Semiconductor Manufacturing. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 1075-1080, IEEE, 2007. [doi]
@inproceedings{KwonM07-0,
title = {SysML-based Simulation Framework for Semiconductor Manufacturing},
author = {Ky Sang Kwon and Leon F. McGinnis},
year = {2007},
doi = {10.1109/COASE.2007.4341777},
url = {http://dx.doi.org/10.1109/COASE.2007.4341777},
researchr = {https://researchr.org/publication/KwonM07-0},
cites = {0},
citedby = {0},
pages = {1075-1080},
booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA},
publisher = {IEEE},
isbn = {978-1-4244-1154-2},
}