Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires

Miku J. Laakso, Simon J. Bleiker, Jessica Liljeholm, Gustaf E. Martensson, Mikhail Asiatici, Andreas C. Fischer, Goran Stemme, Thorbjorn Ebefors, Frank Niklaus. Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires. IEEE Access, 6:44306-44317, 2018. [doi]

@article{LaaksoBLMAFSEN18,
  title = {Through-Glass Vias for Glass Interposers and MEMS Packaging Applications Fabricated Using Magnetic Assembly of Microscale Metal Wires},
  author = {Miku J. Laakso and Simon J. Bleiker and Jessica Liljeholm and Gustaf E. Martensson and Mikhail Asiatici and Andreas C. Fischer and Goran Stemme and Thorbjorn Ebefors and Frank Niklaus},
  year = {2018},
  doi = {10.1109/ACCESS.2018.2861886},
  url = {https://doi.org/10.1109/ACCESS.2018.2861886},
  researchr = {https://researchr.org/publication/LaaksoBLMAFSEN18},
  cites = {0},
  citedby = {0},
  journal = {IEEE Access},
  volume = {6},
  pages = {44306-44317},
}