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Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS

S. Lachhman, C. A. Zorman, W. H. Ko. Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS. In Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, San Diego, CA, USA, August 28 - September 1, 2012. pages 1655-1658, IEEE, 2012. [doi]

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S. Lachhman

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C. A. Zorman

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W. H. Ko

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