S. Lachhman, C. A. Zorman, W. H. Ko. Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS. In Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, San Diego, CA, USA, August 28 - September 1, 2012. pages 1655-1658, IEEE, 2012. [doi]
@inproceedings{LachhmanZK12,
title = {Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS},
author = {S. Lachhman and C. A. Zorman and W. H. Ko},
year = {2012},
doi = {10.1109/EMBC.2012.6346264},
url = {https://doi.org/10.1109/EMBC.2012.6346264},
researchr = {https://researchr.org/publication/LachhmanZK12},
cites = {0},
citedby = {0},
pages = {1655-1658},
booktitle = {Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, San Diego, CA, USA, August 28 - September 1, 2012},
publisher = {IEEE},
isbn = {978-1-4244-4119-8},
}