Data Retention Insights from Joint Analysis on BEOL-Integrated HZO-Based Scaled FeCAPs and 16kbit 1T-1C FeRAM Arrays

J. Laguerre, Simon Martin 0006, Jean Coignus, Catherine Carabasse, Marc Bocquet, François Andrieu, Laurent Grenouillet. Data Retention Insights from Joint Analysis on BEOL-Integrated HZO-Based Scaled FeCAPs and 16kbit 1T-1C FeRAM Arrays. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 1-7, IEEE, 2024. [doi]

Authors

J. Laguerre

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Simon Martin 0006

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Jean Coignus

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Catherine Carabasse

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Marc Bocquet

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François Andrieu

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Laurent Grenouillet

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