Yiu Wai Lai, Joshua E.-Y. Lee. In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 557-561, IEEE, 2012. [doi]
@inproceedings{LaiL12-11,
title = {In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy},
author = {Yiu Wai Lai and Joshua E.-Y. Lee},
year = {2012},
doi = {10.1109/NEMS.2012.6196837},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196837},
researchr = {https://researchr.org/publication/LaiL12-11},
cites = {0},
citedby = {0},
pages = {557-561},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}