Yiu Wai Lai, Joshua E.-Y. Lee. In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 557-561, IEEE, 2012. [doi]
Abstract is missing.