High overtone acoustic resonator HBAR based on IDT's/c-tilted ZnO/Si for timing applications

Farouk Laidoudi, Fayçal Medjili, Cinzia Caliendo, Muhammad Hamidullah, Fares Kanouni, Fouad Boubenider. High overtone acoustic resonator HBAR based on IDT's/c-tilted ZnO/Si for timing applications. In 19th International Multi-Conference on Systems, Signals & Devices, SSD 2022, Sétif, Algeria, May 6-10, 2022. pages 1307-1310, IEEE, 2022. [doi]

Abstract

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