Influence of Spare Parts Service Measures on the Performance of Front-End Wafer Production Process

Douniel Lamghari-Idrissi, Daniel Soellaart, Rob J. I. Basten, Nico P. Dellaert. Influence of Spare Parts Service Measures on the Performance of Front-End Wafer Production Process. In 2019 Winter Simulation Conference, WSC 2019, National Harbor, MD, USA, December 8-11, 2019. pages 2269-2280, IEEE, 2019. [doi]

Abstract

Abstract is missing.