Oxygen induced limitation on grain growth in RF sputtered Indium tin oxide thin films

Buddhi Sagar Lamsal, Yung Huh, Mukul Dubey, K. C. Manoj, Swaminathan Venkatesan, Qiquan Qiao, David Galipeau, Qi Hua Fan. Oxygen induced limitation on grain growth in RF sputtered Indium tin oxide thin films. In IEEE International Conference on Electro-Information Technology , EIT 2013, Rapid City, SD, USA, May 9-11, 2013. pages 1-4, IEEE, 2013. [doi]

Abstract

Abstract is missing.