Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures

Xiaodong Lan, Shu-Yi Zhang, Li Fan, Yan Wang. Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures. Sensors, 16(11):1112, 2016. [doi]

Abstract

Abstract is missing.