UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements

M. Lanza, M. Porti, M. Nafría, X. Aymerich, E. Whittaker, B. Hamilton. UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements. Microelectronics Reliability, 50(9-11):1312-1315, 2010. [doi]

@article{LanzaPNAWH10,
  title = {UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements},
  author = {M. Lanza and M. Porti and M. Nafría and X. Aymerich and E. Whittaker and B. Hamilton},
  year = {2010},
  doi = {10.1016/j.microrel.2010.07.049},
  url = {http://dx.doi.org/10.1016/j.microrel.2010.07.049},
  researchr = {https://researchr.org/publication/LanzaPNAWH10},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {50},
  number = {9-11},
  pages = {1312-1315},
}