Design of CMOS MEMS based on mechanical resonators using a RF simulation approach

Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design of CMOS MEMS based on mechanical resonators using a RF simulation approach. IEEE Trans. on CAD of Integrated Circuits and Systems, 23(6):962-967, 2004. [doi]

@article{LatorreBN04,
  title = {Design of CMOS MEMS based on mechanical resonators using a RF simulation approach},
  author = {Laurent Latorre and Vincent Beroulle and Pascal Nouet},
  year = {2004},
  doi = {10.1109/TCAD.2004.828113},
  url = {http://doi.ieeecomputersociety.org/10.1109/TCAD.2004.828113},
  tags = {rule-based, Pascal, design, systematic-approach},
  researchr = {https://researchr.org/publication/LatorreBN04},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {23},
  number = {6},
  pages = {962-967},
}