Recent advances and new trends in nanotechnology and 3D integration for semiconductor industry

John H. Lau. Recent advances and new trends in nanotechnology and 3D integration for semiconductor industry. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-23, IEEE, 2011. [doi]

Abstract

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