Design and fabrication of a two-axis micro-motion machine for precision alignment

Man Kit Law, Ka Cheong Chiang, Qingsong Xu. Design and fabrication of a two-axis micro-motion machine for precision alignment. In IEEE International Conference on Information and Automation, ICIA 2015, Lijiang, China, August 8-10, 2015. pages 958-963, IEEE, 2015. [doi]

Abstract

Abstract is missing.