Xianhao Le, Jintao Pang, Xuying Chen, Dongsheng Li, Zhen Xu, Chao Gao, Jin Xie. Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 173-176, IEEE, 2018. [doi]
Abstract is missing.