Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process

Eyglis Ledesma, Iván Zamora, Arantxa Uranga, Francesc Torres 0001, Núria Barniol. Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process. Sensors, 21(24):8447, 2021. [doi]

Abstract

Abstract is missing.