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Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University

K. W. Lee, Ji Chel Bea, Mitsu Koyanagi, Takafumi Fukushima, Tetsu Tanaka. Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

Authors

K. W. Lee

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Ji Chel Bea

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Mitsu Koyanagi

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Takafumi Fukushima

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Tetsu Tanaka

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