Monolithic Integration of Polymer and Silicon Nitride Waveguides for Optical Phased Array LiDAR Sensors

Eun-su Lee, Kwon-Wook Chun, Jinung Jin, Sang-Shin Lee, Min-Cheol Oh. Monolithic Integration of Polymer and Silicon Nitride Waveguides for Optical Phased Array LiDAR Sensors. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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