Intel 22nm Low-Power FinFET (22FFL) Process Technology for 5G and Beyond

Hyung-Jin Lee, Steven Callender, Said Rami, Woorim Shin, Qiang Yu, Jose Mauricio Marulanda. Intel 22nm Low-Power FinFET (22FFL) Process Technology for 5G and Beyond. In 2020 IEEE Custom Integrated Circuits Conference, CICC 2020, Boston, MA, USA, March 22-25, 2020. pages 1-7, IEEE, 2020. [doi]

Abstract

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