Multi-Resolution Modeling Method for Automated Material Handling Systems in Semiconductor FABs

Kwanwoo Lee, Woosung Jeon, Sangchul Park. Multi-Resolution Modeling Method for Automated Material Handling Systems in Semiconductor FABs. In Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023. pages 2345-2356, IEEE, 2023. [doi]

Abstract

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