Jaewoo Lee, C. H. Je, Woo-Seok Yang, Jongdae Kim. A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor. In Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013. pages 2116-2122, IEEE, 2013. [doi]
Abstract is missing.