Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Shih-Wei Lee, M. Muoth, L. Durrer, C. Roman, Ch. Hierold. Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 37-40, IEEE, 2011. [doi]

Abstract

Abstract is missing.