On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events

Minho Lee, James R. Morrison, Adar A. Kalir, Kosta Rozen. On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 737-738, IEEE, 2017. [doi]

Abstract

Abstract is missing.