Dong-Yeon Lee, Jaesool Shim, Tae Song Kim, Jae-Hong Park. Optimization of functional layers in piezoelectric thick film MEMS process. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 64-67, IEEE, 2011. [doi]
Abstract is missing.